Spatial control of vapor condensation using convection
US11267012B2 · kind B2 · utility
1Cited by
58References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 10, 2015 |
| Grant date | Mar 8, 2022 |
| Priority date | — |
| Expiry date | Jan 7, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/228
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Embodiments of the disclosed subject matter provide a device including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, and a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.