Resistive flow sensor
US11268839B2 · kind B2 · utility
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20References
11Claims
0Family size
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Key dates
| Filing date | Jan 5, 2020 |
| Grant date | Mar 8, 2022 |
| Priority date | — |
| Expiry date | Feb 23, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F15/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Reliable flow sensors with enclosures that have predictable thermal variations and reduced mechanical tolerances for a more consistent fluid flow and more consistent flow measurements. Thermal variations can be made predictable by using etched structures in silicon blocks. Mechanical tolerances can be reduced using lithography and high-precision semiconductor manufacturing equipment and techniques.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.