SMD-enabled infrared thermopile sensor

US11268861B2 · kind B2 · utility

Assignee

• Heimann Sensor GmbH · DE

Inventors

• Jörg Schieferdecker · Dresden, DE
• Frank Herrmann · Barmstedt, DE
• Christian Schmidt · Heidelberg, DE
• Wilhelm Leneke · Taunusstein, DE
• Marion Simon · Schlangenbad, DE
• Karlheinz Storck · Lorch, DE
• Mischa Schulze · Simbach, DE

Key dates

• Filing date: Dec 22, 2017
• Grant date: Mar 8, 2022
• Expiry date: Feb 7, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J2005/066
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An SMD-enabled infrared thermopile sensor has at least one miniaturized thermopile pixel on a monolithically integrated sensor chip accommodated in a hermetically sealed housing which consists of an at least partially non-metallic housing substrate and a housing cover. A gas or a gas mixture is contained in the housing. The sensor has a particularly low overall height, in particular in the z direction. This is achieved by virtue of an aperture opening being introduced in the housing cover opposite the thermopile pixel(s), which aperture opening is closed with a focusing lens which focuses the radiation from objects onto the thermopile pixel(s) on the housing substrate, and by virtue of a signal processing unit being integrated on the same sensor chip next to the thermopile pixels, wherein the total housing height and the housing cover are at most 3 mm or less than 2.5 mm.