High frequency response pressure sensor based on direct current glow discharge plasma principle

US11268870B2 · kind B2 · utility

Assignee

• Institute of Engineering Thermophysics, Chinese Academy of Sciences · CN

Inventors

• Fan Li · Morristown, US
• Juan Du · Shanghai, CN
• Sichen Wang · Beijing, CN
• Hongwu Zhang · Beijing, CN
• Chaoqun Nie · Beijing, CN

Key dates

• Filing date: Oct 31, 2017
• Grant date: Mar 8, 2022
• Expiry date: Feb 6, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L23/08
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A haptic signalizing device comprises a number of piezoelectric elements arranged below a device surface such that mechanical deformations caused by the converse piezoelectric effect in the at least one piezoelectric element make the device surface to move such that the device surface follows the piezoelectric element and a driving circuit configured to cause the converse piezoelectric effect on the at least one piezoelectric element by generating an alternating electric field over the piezoelectric element in a bipolar fashion, that is, consecutively in both the same and the opposite direction with respect to the polarization of the piezoelectric element, to make the piezoelectric element to move beyond its initial position consecutively in both directions. The piezoelectric element is arranged i) to locally move the device surface inwards when the mechanical deformation in the piezoelectric element is a deflection directed away from the device surface, and ii) to locally move the device surface outwards when the mechanical deformation in the piezoelectric element is a deflection that is directed towards the device surface.