Electrochemical sensor, and a method of forming an electrochemical sensor
US11268927B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2017 |
| Grant date | Mar 8, 2022 |
| Priority date | — |
| Expiry date | Apr 1, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/304
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electrochemical sensor is provided which may be formed using micromachining techniques commonly used in the manufacture of integrated circuits. This is achieved by forming microcapillaries in a silicon substrate and forming an opening in an insulating layer to allow environmental gases to reach through to the top side of the substrate. A porous electrode is printed on the top side of the insulating layer such that the electrode is formed in the opening in the insulating layer. The sensor also comprises at least one additional electrode. The electrolyte is then formed on top of the electrodes. A cap is formed over the electrodes and electrolyte. This arrangement may easily be produced using micromachining techniques.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.