Electrode layer partitioning
US11268976B2 · kind B2 · utility
1Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 4, 2017 |
| Grant date | Mar 8, 2022 |
| Priority date | — |
| Expiry date | Sep 11, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS sensor includes a proof mass that is suspended over a substrate. A sense electrode is located on a top surface of the substrate parallel to the proof mass, and forms a capacitor with the proof mass. The sense electrodes have a plurality of slots that provide improved performance for the MEMS sensor. A measured value sensed by the MEMS sensor is determined based on the movement of the proof mass relative to the slotted sense electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.