Liquid ejecting head and liquid ejecting apparatus
US11273642B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 15, 2020 |
| Grant date | Mar 15, 2022 |
| Priority date | — |
| Expiry date | Apr 15, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/12
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A liquid ejecting head including a diaphragm constituting a portion of a wall surface of a pressure chamber that accommodates a liquid, and a piezoelectric element that vibrates the diaphragm. In the liquid ejecting head, the diaphragm includes a plurality of layers, and the plurality of layers include a compressive film that has compressive stress and a tensile film that has tensile stress. The compressive film and the tensile film are two layers adjacent to each other that have a largest tension difference among the plurality of layers, and an absolute value of the tension difference between the compressive film and the tensile film is 400 [N/m] or smaller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.