Patent · US Active

Overhanging device structures and related methods of manufacture

US11274035B2 · kind B2 · utility

8Cited by
95References
23Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 7, 2020
Grant dateMar 15, 2022
Priority date
Expiry dateApr 10, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/124
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

A overhanging device cavity structure comprises a substrate and a cavity disposed in or on the substrate. The cavity comprises a first cavity side wall and a second cavity side wall opposing the first cavity side wall on an opposite side of the cavity from the first cavity side wall. A support extends from the first cavity side wall to the second cavity side wall and at least partially divides the cavity. A device is disposed on, for example in direct contact with, the support and extends from the support into the cavity.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.