Overhanging device structures and related methods of manufacture
US11274035B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 7, 2020 |
| Grant date | Mar 15, 2022 |
| Priority date | — |
| Expiry date | Apr 10, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/124
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A overhanging device cavity structure comprises a substrate and a cavity disposed in or on the substrate. The cavity comprises a first cavity side wall and a second cavity side wall opposing the first cavity side wall on an opposite side of the cavity from the first cavity side wall. A support extends from the first cavity side wall to the second cavity side wall and at least partially divides the cavity. A device is disposed on, for example in direct contact with, the support and extends from the support into the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.