Semiconductor Mach-Zehnder optical modulator and IQ optical modulator using same
US11275287B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 18, 2019 |
| Grant date | Mar 15, 2022 |
| Priority date | — |
| Expiry date | Apr 18, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/2257
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A Mach-Zehnder modulator is enabled to perform high-speed modulation operation by reducing RF loss of a high-frequency wiring formed on an optical waveguide without deteriorating optical characteristics of branching and multiplexing optical circuits. The Mach-Zehnder modulator includes a Mach-Zehnder (MZ) optical waveguide including two arm waveguides, a 1×2 multimode interference coupler composed of a semiconductor that splits and distributes input light to the two arm waveguides, a 2×1 multimode interference coupler composed of a semiconductor that multiplexes light from the two arm waveguides, and phase modulation means for giving a phase difference to the light that propagates through the two arm waveguides, wherein the 1×2 multimode interference coupler and the 2×1 multimode interference coupler are formed in a high-mesa structure, and higher mode light radiation means for radiating higher mode light is connected to only the 2×1 multimode interference coupler among the two multimode interference couplers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.