Pattern part, method for forming pattern part and method for manufacturing display device using same
US11276737B2 · kind B2 · utility
0Cited by
0References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2019 |
| Grant date | Mar 15, 2022 |
| Priority date | — |
| Expiry date | Feb 19, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K2102/00
Abstract
A method of forming a pattern part includes forming a first film on a target object, the first film having a first cure shrinkage ratio, forming a second film on the first film, the second film having a second cure shrinkage ratio greater than the first cure shrinkage ratio, and patterning the first film and the second film to form a pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.