Composite nitride-based film structure and method for manufacturing same
US11280027B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Nov 21, 2018 |
| Grant date | Mar 22, 2022 |
| Priority date | — |
| Expiry date | Apr 2, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02631
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A composite nitride-based film structure includes a bulk single crystal, a plurality of nitride microcrystals, and an amorphous nitride thin film. The plurality of nitride microcrystals is provided on the bulk single crystal, and has a specific orientation relationship with a crystal structure of the bulk single crystal. The nitride thin film is provided on the bulk single crystal, surrounds the nitride microcrystal, and covers a surface of the bulk single crystal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.