Electrostatically actuated device
US11280995B2 · kind B2 · utility
0Cited by
9References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 30, 2017 |
| Grant date | Mar 22, 2022 |
| Priority date | — |
| Expiry date | Apr 22, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B3/14
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present invention relates to an electrostatically actuated device comprising at least first chamber, an electrode chamber comprising a deformable electrode. The deformable electrode is disposed in the electrode chamber such as to form a first electrode chamber and a second electrode chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.