Patent · US Active

Wafer transfer unit and wafer transfer system

US11282725B2 · kind B2 · utility

3Cited by

2References

6Claims

0Family size

Assignee

VAT Holding AG · CH

Inventors

Florian Ehrne · Feldkirch, AT
Martin Netzer · Bludenz, AT
Andreas Hofer · Dormagen, DE
Eligio Belleri · Balzers, LI
Marco Apolloni · Marbach, CH
Thomas L. Swain · Barrington, US

Key dates

Filing date	May 24, 2019
Grant date	Mar 22, 2022
Priority date	—
Expiry date	Aug 5, 2039

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P90/02
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.