System and method for clamping a work piece
US11282732B2 · kind B2 · utility
0Cited by
15References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 9, 2015 |
| Grant date | Mar 22, 2022 |
| Priority date | — |
| Expiry date | May 11, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G7/02
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A clamping system and a method of clamping a work piece are disclosed. The clamping system has an electrostatic clamp and a high-impedance voltmeter (“HIV”). The electro-static clamp may include a platen and a plurality of electrodes embedded in the platen. In use, at least some of the embedded electrodes provide one side of a capacitor and a work piece provides another side of the capacitor in order to hold the work piece relative to the platen when at least some of the embedded electrodes are electrically charged. The HIV is electrically connected to at least some of the embedded electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.