Acoustofluidic components and process for their preparation

US11285474B2 · kind B2 · utility

Assignee

• Leibniz-Institut für Festkörper- und, Werkstoffforschung Dresden e. V. · DE

Inventors

• Andreas Winkler · Duisburg, DE
• Christine Henze · Dresden, DE
• Thomas Gemming · Dresden, DE

Key dates

• Filing date: May 20, 2019
• Grant date: Mar 29, 2022
• Expiry date: Feb 10, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/2004
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Acoustofluidic components in which at least one microfluidic element and at least one acoustic transducer element are arranged on a piezoelectric substrate and/or on a piezoelectric layer on a non-piezoelectric substrate and/or on a non-piezoelectric substrate on a piezoelectric layer. The at least one microfluidic element is arranged in at least one propagation direction of an acoustic wave excited by the acoustic transducer element and the at least one microfluidic element prepared at least partially by lamination and photolithographic structuring comprises a base, walls and a top. At least the top is prepared by lamination and photolithographic structuring, and the microfluidic element has top thicknesses of 0.01 to 10 times the wavelength of the acoustic wave excited by the acoustic transducer element.