Pressure sensor system, measuring device and method for the manufacture thereof having a support structure being formed by a land grid array/mold premold structure
US11287346B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 16, 2018 |
| Grant date | Mar 29, 2022 |
| Priority date | — |
| Expiry date | Mar 14, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor system including at least one pressure sensor unit, the pressure sensor unit being configured with at least one sensor element which is situated in a cavity of a support structure, signal processing elements being integrated into support structure, the at least one sensor element being embeddable into the support structure to form the pressure sensor unit, and the support structure being formed by a land grid array/mold premold structure (LGA/MPM). The pressure sensor unit is introduced into a sensor housing to be provided with a diaphragm and is supported therein, a residual volume of the sensor housing, which is provided with at least one diaphragm and to the wiring of which the pressure sensor unit is electrically connected, being filled with an incompressible fluid. Also described is a method for manufacturing such a pressure sensor system and a measuring device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.