Capacitive gas sensor
US11287395B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 8, 2017 |
| Grant date | Mar 29, 2022 |
| Priority date | — |
| Expiry date | Nov 9, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2027/222
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive gas sensor in which a second electrode layer made of a nano-carbon material entangled to be three-dimensionally reticulated and a gas-sensitive film are not separated from each other. A capacitive gas sensor includes a substrate; a first electrode layer formed on the substrate; a gas-sensitive film formed on the first electrode layer and having air permeability; and a second electrode layer formed on the gas-sensitive film to be opposed to the first electrode layer and made of a nano-carbon material entangled to be three-dimensionally reticulated. The capacitive gas sensor also includes a reinforcing resin layer having air permeability and disposed at least on the second electrode layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.