Continuous calibration of accelerometer sensitivity by proof-mass dithering
US11287442B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 27, 2018 |
| Grant date | Mar 29, 2022 |
| Priority date | — |
| Expiry date | Nov 1, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0868
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An in-situ test calibration system and method are disclosed where a perpetual out-of-band electrostatic force induced excitation is used to dither the proof-mass of a MEMS based accelerometer where the amount of deflection change is proportional to sensitivity changes. The supplier of the accelerometer would exercise the accelerometer in a calibration station to determine initial sensitivity values. After the calibration and before removing the accelerometer from the calibration station, the supplier would start the dither and calibrate the acceleration equivalent force (FG) to drive voltage transfer function (FG/V). After installation of the accelerometer into a system or sometime later in the field, any changes in the FG/V transfer function due to changes in the sensitivity are observable and can be used for re-calibrating the accelerometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.