Array atomic force microscopy for enabling simultaneous multi-point and multi-modal nanoscale analyses and stimulations

US11287444B2 · kind B2 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Ratneshwar Lal · Village of La Jolla, US
• Qingqing Yang · Fujian, CN
• Qian Ma · San Diego, US
• Zhaowei Liu · Qingdao, CN

Key dates

• Filing date: Oct 8, 2019
• Grant date: Mar 29, 2022
• Expiry date: Oct 8, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q60/38
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Disclosed is an atomic force microscopy system includes a laser source configured to generate an optical probe beam containing light of different spectral light components at different optical wavelengths, a dispersive optical device positioned to receive the optical probe beam and configured to disperse the optical probe beam into different dispersed light beams that are at different optical wavelengths and are spatially separated from one another, a cantilever array including a plurality of cantilevers structured to detect a sample and configured to deflect the different dispersed light beams by moving in position based on an interaction with the sample to produce multiple deflected output beams at different output optical wavelengths from the cantilevers, and a plurality of photodetectors to receive the multiple deflected output beams of different wavelengths from the cantilevers, respectively.