Patent · US Active

Lithographic apparatus

US11287750B1 · kind B1 · utility

0Cited by

0References

16Claims

0Family size

Assignee

CHANGXIN MEMORY TECHNOLOGIES, INC. · CN

Inventor

Shuping Li · Tangxia, CN

Key dates

Filing date	Aug 18, 2021
Grant date	Mar 29, 2022
Priority date	—
Expiry date	Aug 18, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70916
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A lithographic apparatus includes a machine table, a base, a placement table, a first baffle plate, a first driving device, and a transporting device. The machine table has a cavity formed by a side surface, a top surface, and a bottom surface. A conveying door is arranged on the side surface. A transferring device in the cavity can extend out from or retract back into the cavity through the conveying door. The placement table is configured to bear a mask carrier, and can at least extend out from or retract back to a bearing surface of the base. The first driving device is configured to drive the placement table to reciprocate between a first position and a second position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.