Method and apparatus for carrying out a time-resolved interferometric measurement
US11293747B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 27, 2018 |
| Grant date | Apr 5, 2022 |
| Priority date | — |
| Expiry date | Nov 26, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2614
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An embodiment of the invention relates to a method for carrying out a time-resolved interferometric measurement comprising the steps of generating at least two coherent waves, overlapping said at least two coherent waves and producing an interference pattern, measuring the interference pattern for a given exposure time, thereby forming measured interference values, and analyzing the measured interference values and extracting amplitude and/or phase information from the measured interference values. In at least one time segment, hereinafter referred to as disturbed time segment, of the expo-sure time, the interference pattern is intentionally disturbed or destroyed such that the corresponding measured interference values describe a disturbed or destroyed interference pattern. In at least one other time segment, hereinafter referred to as undisturbed time segment, of the exposure time, the interference pattern is undisturbed or at least less disturbed compared to the disturbed time segment such that the corresponding measured interference values describe an undisturbed or less disturbed interference pattern. The measured interference values that were measured during the entire given …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.