Patent · US Active

3D microscope including insertable components to provide multiple imaging and measurement capabilities

US11294161B2 · kind B2 · utility

0Cited by

15References

15Claims

0Family size

Assignee

KLA-TENCOR CORPORATION · US

Inventors

James Jianguo Xu · San Jose, US
Ken Kinsun Lee · San Diego, US
Rusmin Kudinar · Union City, US
Ronny Soetarman · Fremont, US
Hung Phi Nguyen · Amherst, US
Zhen Hou · Fremont, US

Key dates

Filing date	Dec 2, 2020
Grant date	Apr 5, 2022
Priority date	—
Expiry date	Dec 2, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG02B21/367
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities. These capabilities include Nomarski imaging, polarized light imaging, quantitative differential interference contrast (q-DIC) imaging, motorized polarized light imaging, phase-shifting interferometry (PSI), and vertical-scanning interferometry (VSI).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.