Apparatus and method for assessing yield rates of machines in a manufacture system
US11294362B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 17, 2020 |
| Grant date | Apr 5, 2022 |
| Priority date | — |
| Expiry date | Aug 17, 2040 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A yield-rate assessment apparatus for a manufacture system including a plurality of machines, each machine participating in one or more manufacture steps of a batch of products in the manufacture system, performs for each machine: calculating a bad-piece expectation value and a quantity of potential bad pieces at each corresponding manufacture step based on a quantity of bad pieces detected after the last one of the manufacture steps is finished and an initial yield rate of the current machine; calculating a good-piece expectation value based on a quantity of good pieces detected after the last one of the manufacture steps is finished and a summation of all quantities of potential bad pieces calculated for the current machine; and assessing a yield rate according to the good-piece expectation value calculated for the current machine and a summation of the bad-piece expectation value calculated for the current machine at each corresponding step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.