Patent · US Active

Flow laminator

US11300436B2 · kind B2 · utility

0Cited by
9References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 21, 2020
Grant dateApr 12, 2022
Priority date
Expiry dateJul 3, 2040

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG05D7/0635
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A fluid sensing apparatus is provided having a fluid flow channel having a flow restriction. A fluid sensor is in fluid communication with first and second fluid ports, and a laminar flow element. The laminar flow element includes a flow stabilisation rod which defines a fluid sensing portion of the fluid flow channel. The flow restriction comprises a reduction in the hydraulic diameter of the fluid sensing portion of the fluid flow channel which is caused by a decrease in diameter of the fluid flow channel, or by an increase in the diameter of the flow stabilisation rod, or by both a decrease in diameter of the fluid flow channel and an increase in the diameter of the flow stabilisation rod. Also provided is a mass flow controller including such a fluid sensing apparatus.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.