Flexible temperature-sensitive pressure sensor based on nanoparticle lattice array quantum conductance, and assembly method and application thereof
US11300470B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 17, 2020 |
| Grant date | Apr 12, 2022 |
| Priority date | — |
| Expiry date | Dec 18, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K2211/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention discloses a flexible temperature-sensitive pressure sensor based on nanoparticle array quantum conductance, and an assembly method and application thereof. The sensor includes a high polymer film, metal nanoparticle arrays, metal microelectrodes, and an external circuit for conductance measurement; at least one group of metal nanoparticle arrays are deposited on upper and lower surfaces of the high polymer film, and in the same group, positions of metal nanoparticle arrays on the upper and lower surfaces are in one-to-one correspondence; the metal microelectrodes are arranged on two sides of each group of metal nanoparticle arrays and are symmetrically distributed on the upper and lower surfaces of the high polymer film; and the external circuit for conductance measurement is electrically connected to the metal microelectrodes. Conductance response signals of the nanoparticle arrays in the present invention have an exponential relationship with a distance between particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.