Integrated sensor apparatus with pressure sensing element and flow sensing element
US11300535B2 · kind B2 · utility
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18Claims
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Key dates
| Filing date | Apr 5, 2019 |
| Grant date | Apr 12, 2022 |
| Priority date | — |
| Expiry date | Jan 22, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0292
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for calculating a thermal conductivity of a gaseous substance is provided. The apparatus includes a substrate; a cover member disposed on the substrate, wherein the cover member comprises a flow tunnel for the gaseous substance; a flow sensing element disposed on the substrate, wherein the flow sensing element is exposed to the gaseous substance in the flow tunnel; and a pressure sensing element disposed on the substrate, wherein the pressure sensing element is exposed to the gaseous substance in the flow tunnel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.