Patent · US Active

Stable solutions of monoalkyl tin alkoxides and their hydrolysis and condensation products

US11300876B2 · kind B2 · utility

1Cited by
15References
23Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 20, 2019
Grant dateApr 12, 2022
Priority date
Expiry dateJun 4, 2040

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/20
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Precursor solutions for radiation patternable coatings are formed with an organic solvent and monoalkyl tin trialkoxides in which the water content of the solvent is adjusted to be within 10 percent of a selected value. Generally, the water content of the solvent is adjusted through water addition, although water removal can also be used. In some embodiments, the adjusted water content of the solvent can be from about 250 ppm by weight to about 10,000 ppm by weight. With the appropriate selection of ligands, the adjusted precursor solutions can be stable for at least about 42 days, and in some cases at least 8 months.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.