Patent · US Active

Delivery of light into a vacuum chamber using an optical fiber

US11302590B2 · kind B2 · utility

0Cited by

8References

18Claims

0Family size

Assignee

KLA Corporation · US

Inventors

Emanuel Saerchen · Gießen, DE
Donald Pettibone · San Jose, US
Oscar G. Florendo · Hollister, US
Li-Min Chen · Norwalk, US
Martin Brutsch · San Jose, US

Key dates

Filing date	Nov 22, 2019
Grant date	Apr 12, 2022
Priority date	—
Expiry date	Nov 22, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/24564
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A system for laser enhanced voltage contrast using an optical fiber is provided. The system includes a vacuum chamber with a stage that secures a wafer. A laser light source outside the vacuum chamber directs light to an optical fiber. The optical fiber transmits all wavelengths of light from the laser light source into the vacuum chamber through a wall of the vacuum chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.