Hermetic housing comprising a getter, optoelectronic component or MEMS device incorporating such a hermetic housing and associated production method
US11305983B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 27, 2019 |
| Grant date | Apr 19, 2022 |
| Priority date | — |
| Expiry date | Sep 27, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/047
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A hermetic housing is disclosed (10a) for an optoelectronic component (11) or a MEMS device configured to form an enclosure (12) within which a low pressure or vacuum prevails. The hermetic housing includes: an optical window (14) transparent for at least one wavelength of interest (λ); and a layer of a getter material (15a) configured to capture gases present in said enclosure and deposited on the optical window opposite the enclosure. This layer of getter material has a thickness (e_t), greater than 60 nanometers, and a porosity (P) in the range from 10 to 70% to satisfy the following relation: (1−P)*e_t<λ/2πk with λ corresponding to the at least one wavelength of interest, and k corresponding to the extinction coefficient of the material of the layer of getter material for the at least one wavelength of interest of the optical window.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.