Carrying device and fixing method of carrying device
US11306788B2 · kind B2 · utility
0Cited by
5References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 25, 2019 |
| Grant date | Apr 19, 2022 |
| Priority date | — |
| Expiry date | May 7, 2040 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16D2121/20
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A carrying device and, a fixing method of a carrying device are provided. The carrying device includes a body and an electromagnet fixing module disposed on the body; wherein the electromagnet fixing module is configured to fix the carrying device. The present application uses the electromagnet fixing module to fix the carrying device, which can avoid downtime of an exposure machine caused by shaking of the carrying device when a robot arm of the exposure machine picks or places the mask form the carrying device so as to improve throughput.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.