Patent · US Active

Micromechanical micromirror array and corresponding operating method

US11307404B2 · kind B2 · utility

3Cited by

1References

15Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Helmut Grutzeck · Tübingen, DE
Timo Schary · Grötzingen, DE
Joerg Muchow · Reutlingen, DE
Philip Kaupmann · Gundelfingen, DE

Key dates

Filing date	Oct 18, 2018
Grant date	Apr 19, 2022
Priority date	—
Expiry date	Feb 23, 2039

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/0163
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A micromechanical micromirror array including a frame including a cutout, a micromirror device suspended on the frame in the area of the cutout in a first plane, a first pivoting vane device suspended on the frame protruding into the area of the cutout, coupled to the micromirror device via a first spring device, a second pivoting vane device suspended on the frame protruding into the area of the cutout, coupled to the micromirror device via a second spring device, a first drive device for deflecting the first pivoting vane device along a first axis, perpendicular to the first plane, and a second drive device for the antiphase deflection of the second pivoting vane device along the first axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.