Patent · US Active

MEMS optical switch with dual cantilever couplers

US11307483B2 · kind B2 · utility

2Cited by

20References

20Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Zilun Gong · Berkeley, US
Ning Wang · Shanghai, CN
Alexander Huebel · Leonberg, DE
Tobias Graf · Jena, DE

Key dates

Filing date	Jul 2, 2020
Grant date	Apr 19, 2022
Priority date	—
Expiry date	Jul 2, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG02F2203/24
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical switch includes a bus waveguide and an optical antenna supported by a substrate, a first and second coupling waveguide, a first and second actuation electrode, and a first and second reaction electrode. The first coupling waveguide is disposed parallel with the substrate and aligned with the bus waveguide. The first reaction electrode is coupled with, and adjacent to, the first coupling waveguide. The second coupling waveguide is optically connected with the first coupling waveguide and suspended over and configured to optically couple with the optical antenna. The second reaction electrode is coupled with, and adjacent to, the second coupling waveguide. The first and second actuation electrodes are supported by the substrate and configured to control the position of the first and second coupling waveguide, respectively, relative to the bus waveguide and optical antenna, via the first and second reaction electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.