Method, apparatus, and system for forming code
US11307506B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 1, 2019 |
| Grant date | Apr 19, 2022 |
| Priority date | — |
| Expiry date | Feb 18, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/54486
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present application provides a method, an apparatus, and a system for forming code. The method includes while a substrate is transferred to an exposure machine, adjusting the substrate to align with an exposure alignment mark on the substrate with the exposure machine; forming a code formation area on the adjusted substrate by controlling the exposure machine; while the substrate formed with the code formation area is transferred to a code formation machine, adjusting the substrate to align the exposure alignment mark on the substrate with the code formation machine; and forming an identification code in the code formation area on the adjusted substrate by controlling the code formation machine.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.