Methods for testing or adjusting a charged-particle detector, and related detection systems
US11309170B2 · kind B2 · utility
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19Claims
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Key dates
| Filing date | Apr 23, 2020 |
| Grant date | Apr 19, 2022 |
| Priority date | — |
| Expiry date | Apr 23, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/025
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods for testing or adjusting a charged-particle detector are provided. A diagnostic and/or adjustment method for a charged-particle detector of an instrument includes providing, from a photon source, photons incident on the charged-particle detector. Moreover, the method includes detecting a response by the charged-particle detector to the photons incident thereon. Related detection systems are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.