Patent · US Active

Microdevice comprising at least two movable elements

US11312618B2 · kind B2 · utility

0Cited by

0References

19Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Audrey Berthelot · Meylan, FR
Mikael Colin · Grenoble, FR
Alain Jeanroy · Conflans-Sainte-Honorine, FR
Guillaume Lehee · Moissy-Cramayel, FR
Olivier Vancauwenberghe · Moissy-Cramayel, FR
Philippe Onfroy · Moissy-Cramayel, FR
Jean-Sebastien Mace · Annecy, FR

Key dates

Filing date	Mar 14, 2018
Grant date	Apr 26, 2022
Priority date	—
Expiry date	Jul 1, 2038

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/051
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A microdevice (100) comprising a movable element (111) capable of moving relative to a fixed part (115), produced in first and second layers of material (104, 106) arranged one above the other such that the movable element comprises a portion (112) of the first layer and a portion (118) of the second layer secured to each other, and wherein the movable element is suspended from the fixed part by a suspension structure (121) formed in the first and/or second layer of material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.