Optical position-measuring device
US11313672B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 8, 2020 |
| Grant date | Apr 26, 2022 |
| Priority date | — |
| Expiry date | Sep 26, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/1006
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical position-measuring device for sensing a relative position of two objects, each object being connected to a grating. The optical position-measuring device is configured such that, at one of the gratings, an illumination beam emitted from a light source is split into two sub-beams which, in respective scanning beam paths following the splitting, experience different polarization-optical effects and recombine at one of the gratings. After the differently polarized sub-beams are recombined, a plurality of phase-shifted, displacement-dependent scanning signals are generatable from a resulting signal beam in a detection unit. No separate polarization-optical components are disposed in the scanning beam paths of the sub-beams between splitting and recombination. At least one of the gratings is configured as a polarization grating configured to produce the different polarization-optical effects and such that diffraction orders with different polarization states are produced at each point of incidence on the polarization grating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.