Hybrid 3D inspection system
US11313794B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 6, 2020 |
| Grant date | Apr 26, 2022 |
| Priority date | — |
| Expiry date | Oct 6, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2226/13
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical inspection apparatus includes an interferometer module, which is configured to direct a beam of coherent light toward an area under inspection and to produce a first image of interference fringes of the area. The apparatus also includes a triangulation module configured to project a pattern of structured light onto the area, and at least one image sensor configured to capture the first image of interference fringes and a second image of the pattern that is reflected from the area. Beam combiner optics are configured to direct the beam of coherent light and the projected pattern to impinge on the same location on the area. A processor is configured to process the first and second images in order to generate a 3D map of the area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.