Near-zero power wakeup electro-mechanical system
US11313877B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 19, 2019 |
| Grant date | Apr 26, 2022 |
| Priority date | — |
| Expiry date | Mar 20, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0833
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS includes, in part, a parallel plate capacitor, a proofmass adapted to be displaced by a first distance from a rest state in response to a first voltage applied to the capacitor, and a piezoelectric material adapted to generate a second voltage in response to an external force applied to the MEMS. The second voltage causes the MEMS to transition from a standby mode to an active mode of operation. The proofmass is displaced by a second distance in response to the external force thereby causing the piezoelectric material to generate the second voltage. A spring couples the proofmass to the piezoelectric material, and a transistor turns on in response to the second voltage thereby causing the MEMS to transition to the active mode of operation. The proofmass returns to the rest state when the MEMS is in the active mode of operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.