Mask structure optimization device, mask structure optimization method, and program
US11314994B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 30, 2019 |
| Grant date | Apr 26, 2022 |
| Priority date | — |
| Expiry date | Jan 30, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1447
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mask structure optimization device includes a classification target image size acquisition unit that is configured to acquire a size of a classification target image which is an image including a classification target, a mask size setting unit that is configured to set a size of a mask applied to the classification target image, a brightness detection unit that is configured to detect a brightness of each pixel within the classification target image at a position on an opposite side of the mask from the classification target image, a sum total brightness calculation unit that is configured to calculate the sum total brightness of the each pixel within the classification target image detected by the brightness detection unit, an initial value setting unit that is configured to set an initial value for a mask pattern of the mask, and a movement unit that is configured to relatively move the mask with respect to the classification target image. The sum total brightness calculation unit is configured to calculate the sum total brightness of the each pixel within the classification target image every time the movement unit relatively moves the mask by a predetermined movement amount. …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.