Grating couplers integrated with one or more airgaps
US11320589B1 · kind B1 · utility
2Cited by
9References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 29, 2020 |
| Grant date | May 3, 2022 |
| Priority date | — |
| Expiry date | Oct 29, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12107
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to grating couplers integrated with one or more airgap and methods of manufacture. The structure includes: a substrate material comprising one or more airgaps; and a grating coupler disposed over the substrate material and the one or more airgaps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.