Patent · US Active

Display device, method for forming a pattern and method for manufacturing display device

US11320712B2 · kind B2 · utility

0Cited by
0References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 18, 2020
Grant dateMay 3, 2022
Priority date
Expiry dateJun 18, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10K59/1201
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A display device includes a thin film transistor on a base substrate and a signal wiring electrically connected to the thin film transistor. The signal wiring includes a main conductive layer including copper, and a capping layer including titanium the capping layer overlapping a portion of an upper surface of the main conductive layer. The signal wiring has a taper angle in a range of about 70° to about 90°. A thickness of the capping layer is in a range of about 100 Å to about 300 Å, and a thickness of the main conductive layer is in a range of about 1,000 Å to about 20,000 Å.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.