Patent · US Active

Cantilever beam waveguide for silicon photonics device

US11320718B1 · kind B1 · utility

9Cited by
75References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 20, 2020
Grant dateMay 3, 2022
Priority date
Expiry dateAug 20, 2040

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02F2203/24
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A cantilever beam waveguide for a silicon photonics device may be formed in a device layer (e.g., a silicon device layer) of a silicon photonics device (e.g., a chip) and may be configured to bend to align the cantilever beam waveguide or a portion thereof with one or more additional components of the silicon photonics device or another device, including output couplers, optical sources, and waveguides.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.