Actuator device for aligning an element, projection exposure apparatus for semiconductor lithography, and method for aligning an element
US11320749B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 1, 2021 |
| Grant date | May 3, 2022 |
| Priority date | — |
| Expiry date | Apr 1, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70258
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An actuator device for aligning an element includes at least one first actuator unit, which is secured to a support structure, for a first setting range and a second actuator unit, which is able to be secured to the element, for a second setting range. The second actuator unit is connected to an output element of the first actuator unit so that the positioning of the second actuator unit is adjustable by an adjustment of the output element. The first actuator unit has an adjusting element and a fixing element, which is able to be secured to the support structure. The fixing element secures the output element in a force-locking manner in an operating state of the element. The fixing element is furthermore configured to release the force-locking connection in a setting state of the element to enable an adjustment of the output element via the adjusting element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.