Integrated thermoelectric structure, method for manufacturing an integrated thermoelectric structure, method for operating same as a detector, thermoelectric generator and thermoelectric Peltier element

US11322672B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• UNIVERSITÄT DUISBURG-ESSEN · DE

Inventors

• Erik Verheyen · Duisburg, DE
• Tobias Kleinfeld · Duisburg, DE
• Dirk Weiler · Germering, DE
• Holger Vogt · Mülheim, DE

Key dates

• Filing date: May 1, 2017
• Grant date: May 3, 2022
• Expiry date: Jun 16, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N10/13

Abstract

Described is an integrated vertical structure for infrared sensors, Peltier cooling, and thermoelectric generator applications consisting of a thermally insulating layer which is kept at a distance to a substrate by at least two spacers. In addition, the spacers have conductor structures which serve as thermoelectric elements.A method realizes manufacturing the integrated thermoelectric structure, a method realizes the operation of the integrated thermoelectric structure as a detector, a further method realizes the operation of the integrated thermoelectric structure as a thermoelectric generator, and a method realizes the operation of the integrated thermoelectric structure as a thermoelectric Peltier element.