Masks for fabrication of organic lighting-emitting diode devices
US11326245B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 29, 2019 |
| Grant date | May 10, 2022 |
| Priority date | — |
| Expiry date | Oct 3, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask includes a mask body and at least one sub-mask provided on the mask body. The sub-mask includes an evaporation zone and a shield portion. The shield portion is provided with at least one groove in a thickness direction of the sub-mask. The groove has a depth smaller than a thickness of the mask body. Since the shield portion is provided with the groove, and a single groove has a depth smaller than the thickness of the mask body, it not only ensures that there is no pixel evaporated onto a substrate at the shield portion, but also reduces the thickness of the shield portion, thereby reduces weight thereof, lowers the weight difference between the shield portion and the evaporation zone and reduces the stress concentration on the shield portion, resulting in that the mask body is evenly stressed during tensioning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.