Protecting an interior of a gas container with an ALD coating
US11326254B2 · kind B2 · utility
0Cited by
36References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 3, 2014 |
| Grant date | May 10, 2022 |
| Priority date | — |
| Expiry date | Mar 2, 2036 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2203/0607
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus and method for protecting a gas container interior, where an inlet and exhaust manifold include a port assembly attachable to a port of the gas container is provided, the gas container interior is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases via the port assembly and the port into the gas container interior, and reaction residue is pumped via the port and the port assembly out from the gas container.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.