Patent · US Active

Protecting an interior of a gas container with an ALD coating

US11326254B2 · kind B2 · utility

0Cited by
36References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 3, 2014
Grant dateMay 10, 2022
Priority date
Expiry dateMar 2, 2036

Classification

  • Technology area (CPC F)Mechanical Engineering; Lighting; Heating
  • CPC primaryF17C2203/0607
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

An apparatus and method for protecting a gas container interior, where an inlet and exhaust manifold include a port assembly attachable to a port of the gas container is provided, the gas container interior is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases via the port assembly and the port into the gas container interior, and reaction residue is pumped via the port and the port assembly out from the gas container.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.