Height detection apparatus and coating apparatus equipped with the same
US11326871B2 · kind B2 · utility
0Cited by
5References
7Claims
0Family size
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Key dates
| Filing date | Aug 20, 2020 |
| Grant date | May 10, 2022 |
| Priority date | — |
| Expiry date | Aug 20, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6715
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A height detection apparatus successively changes the brightness of white light from a first level to a second level in accordance with a position of a Z stage and captures an image of interference light while moving a two-beam interference objective lens relative to a paste film in an optical axis direction, detects, as a focus position, a position of the Z stage where the intensity of interference light is highest in a period during which the brightness of white light is set to the first or second level, for each pixel of the captured image, and obtains the height of the paste film based on a detection result.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.