Vibrator device, circuit device, method of manufacturing vibrator device, electronic apparatus, and vehicle
US11326881B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 8, 2019 |
| Grant date | May 10, 2022 |
| Priority date | — |
| Expiry date | Nov 29, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/20
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A vibrator device includes a vibrator having a first and second electrode, and a circuit device having a drive circuit adapted to drive the vibrator, and an output circuit adapted to output a monitor signal corresponding to a vibration characteristic of the vibrator while driven by the drive circuit. The circuit device includes a first terminal electrically connected to the first electrode, and from which an output signal from the drive circuit to the vibrator is output, a second terminal electrically connected to the second electrode, and to which an input signal from the vibrator to the drive circuit is input, a third terminal electrically separated from the first electrode and the second electrode, and a monitor terminal from which the monitor signal is output. The vibrator is supported on an active surface side of the circuit device using conductive bumps respectively to the first, second, and third terminal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.