Linearized micromechanical sensor

US11326969B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Stefan Zehringer · Reutlingen, DE
• Andreas Duell · Stuttgart, DE
• Arne Dannenberg · Metzingen, DE
• Helmut Grutzeck · Tübingen, DE
• Jochen Franz · Reutlingen, DE
• Mike Schwarz · Aspenhausiedlung, DE
• Soeren Zimmermann · Reutlingen, DE
• Stephan Oppl · Pfullingen, DE

Key dates

• Filing date: Dec 8, 2017
• Grant date: May 10, 2022
• Expiry date: May 13, 2039

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/058
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical sensor includes a substrate having a cavity; a flexible diaphragm spanning the cavity; and a lever element that spans the diaphragm and has a first and second end section on opposite sides of a center section. A first joint element is between the first end section and the substrate and a second joint element is between the center section and the diaphragm. The lever element can be pivoted due to a deflection of the diaphragm. Two capacitive sensors are provided, each having two electrodes, one electrode of each sensor being mounted at one of the end sections of the lever element, and the other being mounted on the substrate. The electrodes are disposed so that distances between the electrodes of different sensors are influenced oppositely when the lever element is pivoted. Also, an actuator is provided for applying an actuating force between the lever element and the substrate.