Probe cards, system for manufacturing semiconductor device, and method of manufacturing semiconductor device
US11327095B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 28, 2020 |
| Grant date | May 10, 2022 |
| Priority date | — |
| Expiry date | Aug 14, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/31905
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe card, a system for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device are provided. A probe card includes a first probe configured to contact a first ground pad of a device under test, a reference resistor including a first terminal and a second terminal and connected to the first probe, and a second probe configured to contact a second ground pad of the device under test, wherein the second probe is further configured to be connected to a ground node for applying a reference potential, and the first terminal of the reference resistor is configured to be connected to the first probe and the second terminal of the reference resistor is configured to receive an input potential.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.